Products - EpiWorks, Inc

By: Epiworks  11-11-2011
Keywords: Device Technology

Don't be misled that high-performance products and reliable volume manufacturing can't go hand-in-hand. At EpiWorks, we know they can.

EpiWorks' quality and service are no accident. Our seasoned manufacturing team is skilled at growth, characterization, and device technology.

Wafer size: 50, 75, 100, 150 mm
Technique: LP-MOCVD

MOCVD production capability overview

  • Aixtron 2600 G3 production platform
  • 18,000 square foot facility
  • 5,000 square foot, class 1000 cleanroom

Standard materials test and characterization capabilities

  • Full-wafer mapping from 50 mm to 150 mm
  • KLA-Tencor Surfscan 6220
  • Lehighton LEI1510RS resistivity
  • Accent RPM2000 PL
  • Bede QC200 X-ray
  • Accent HL5500PC hall
  • Tencor AlphaStep
  • Accent polaron ECV profiler
  • Nomarski microscopy
  • Full-wafer quick-lot device fabrication
  • Full electrical DC test


Base Material

Material Capability

Wafer Diameter

EpiHBT™ GaAs InGaP/GaAs up to 150 mm
InP InP/InGaAs (carbon doping) up to 100 mm

Keywords: Device Technology

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